Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane
Download or Read eBook Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane PDF written by Yanyao Yu and published by . This book was released on 1993 with total page 116 pages. Available in PDF, EPUB and Kindle.
Author | : Yanyao Yu |
Publisher | : |
Total Pages | : 116 |
Release | : 1993 |
ISBN-10 | : OCLC:29983777 |
ISBN-13 | : |
Rating | : 4/5 (77 Downloads) |
Book Synopsis Synthesis and Characterization of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using Diethylsilane by : Yanyao Yu
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