Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators
Download or Read eBook Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators PDF written by Patrick Ching-Pak Cheung and published by . This book was released on 1995 with total page 522 pages. Available in PDF, EPUB and Kindle.
| Author | : Patrick Ching-Pak Cheung |
| Publisher | : |
| Total Pages | : 522 |
| Release | : 1995 |
| ISBN-10 | : UCAL:C3386419 |
| ISBN-13 | : |
| Rating | : 4/5 (19 Downloads) |
Book Synopsis Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators by : Patrick Ching-Pak Cheung
Book excerpt:
