Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]
Download or Read eBook Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform] PDF written by Akhtar Mirfazli and published by National Library of Canada = Bibliothèque nationale du Canada. This book was released on 2004 with total page 192 pages. Available in PDF, EPUB and Kindle.
Author | : Akhtar Mirfazli |
Publisher | : National Library of Canada = Bibliothèque nationale du Canada |
Total Pages | : 192 |
Release | : 2004 |
ISBN-10 | : 061293943X |
ISBN-13 | : 9780612939431 |
Rating | : 4/5 (3X Downloads) |
Book Synopsis Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform] by : Akhtar Mirfazli
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