Aluminum Nitride Thin Films for MEMS Resonators
Download or Read eBook Aluminum Nitride Thin Films for MEMS Resonators PDF written by Vanni Lughi and published by . This book was released on 2006 with total page 530 pages. Available in PDF, EPUB and Kindle.
Author | : Vanni Lughi |
Publisher | : |
Total Pages | : 530 |
Release | : 2006 |
ISBN-10 | : 0542681315 |
ISBN-13 | : 9780542681318 |
Rating | : 4/5 (15 Downloads) |
Book Synopsis Aluminum Nitride Thin Films for MEMS Resonators by : Vanni Lughi
Book excerpt: High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (