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3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system
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Silicon Micromachined Waveguide Transitions and Three-dimensional Lithography for High Frequency Packaging
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Physical Design for 3D Integrated Circuits
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Physical Design for 3D Integrated Circuits reveals how to effectively and optimally design 3D integrated circuits (ICs). It also analyzes the design tools for 3