Sputtering by Particle Bombardment
Download or Read eBook Sputtering by Particle Bombardment PDF written by Rainer Behrisch and published by Springer Science & Business Media. This book was released on 2007-07-26 with total page 527 pages. Available in PDF, EPUB and Kindle.
| Author | : Rainer Behrisch |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 527 |
| Release | : 2007-07-26 |
| ISBN-10 | : 9783540445029 |
| ISBN-13 | : 3540445021 |
| Rating | : 4/5 (29 Downloads) |
Book Synopsis Sputtering by Particle Bombardment by : Rainer Behrisch
Book excerpt: This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
