Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry
Download or Read eBook Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry PDF written by OECD and published by OECD Publishing. This book was released on 2015-04-03 with total page 80 pages. Available in PDF, EPUB and Kindle.
| Author | : OECD |
| Publisher | : OECD Publishing |
| Total Pages | : 80 |
| Release | : 2015-04-03 |
| ISBN-10 | : 9789264502437 |
| ISBN-13 | : 9264502432 |
| Rating | : 4/5 (37 Downloads) |
Book Synopsis Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry by : OECD
Book excerpt: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
