Related Books
Language: en
Pages: 448
Pages: 448
Type: BOOK - Published: 2008-03-24 - Publisher: Trans Tech Publications Ltd
Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of in
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 2008 - Publisher: Trans-Tech Publications
Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of in
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 1999-03-17 - Publisher: Elsevier Science
Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in mater
Language: en
Pages: 568
Pages: 568
Type: BOOK - Published: 2013-03-09 - Publisher: Springer Science & Business Media
Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and
Language: en
Pages: 441
Pages: 441
Type: BOOK - Published: 2012-12-02 - Publisher: Academic Press
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled envi