Process Technology for Silicon Carbide Devices
Download or Read eBook Process Technology for Silicon Carbide Devices PDF written by Carl-Mikael Zetterling and published by IET. This book was released on 2002 with total page 202 pages. Available in PDF, EPUB and Kindle.
| Author | : Carl-Mikael Zetterling |
| Publisher | : IET |
| Total Pages | : 202 |
| Release | : 2002 |
| ISBN-10 | : 0852969988 |
| ISBN-13 | : 9780852969984 |
| Rating | : 4/5 (88 Downloads) |
Book Synopsis Process Technology for Silicon Carbide Devices by : Carl-Mikael Zetterling
Book excerpt: This book explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics etc) and describes how these are integrated in device manufacture.
