This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. C

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin

Contains useful process details, recipes, tables, charts and includes numerous device applications.