MEMS Materials and Processes Handbook
Download or Read eBook MEMS Materials and Processes Handbook PDF written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle.
| Author | : Reza Ghodssi |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 1211 |
| Release | : 2011-03-18 |
| ISBN-10 | : 9780387473185 |
| ISBN-13 | : 0387473181 |
| Rating | : 4/5 (85 Downloads) |
Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi
Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
