Measurement Technology for Micro-Nanometer Devices
Download or Read eBook Measurement Technology for Micro-Nanometer Devices PDF written by Wendong Zhang and published by John Wiley & Sons. This book was released on 2017-01-17 with total page 341 pages. Available in PDF, EPUB and Kindle.
Author | : Wendong Zhang |
Publisher | : John Wiley & Sons |
Total Pages | : 341 |
Release | : 2017-01-17 |
ISBN-10 | : 9781118717967 |
ISBN-13 | : 1118717961 |
Rating | : 4/5 (67 Downloads) |
Book Synopsis Measurement Technology for Micro-Nanometer Devices by : Wendong Zhang
Book excerpt: A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices