As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e

Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufactur

Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This b

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were