Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions
Download or Read eBook Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions PDF written by Reid Alyn Brennen and published by . This book was released on 1993 with total page 476 pages. Available in PDF, EPUB and Kindle.
| Author | : Reid Alyn Brennen |
| Publisher | : |
| Total Pages | : 476 |
| Release | : 1993 |
| ISBN-10 | : UCAL:C3372071 |
| ISBN-13 | : |
| Rating | : 4/5 (71 Downloads) |
Book Synopsis Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions by : Reid Alyn Brennen
Book excerpt:
