In Situ Optimization of Co-implantation and Substrate Temperature Conditions for Nv-center Formation in Single Crystal Diamonds
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Author | : |
Publisher | : |
Total Pages | : |
Release | : 2011 |
ISBN-10 | : OCLC:1065599433 |
ISBN-13 | : |
Rating | : 4/5 (33 Downloads) |
Book Synopsis In Situ Optimization of Co-implantation and Substrate Temperature Conditions for Nv-center Formation in Single Crystal Diamonds by :
Book excerpt: We present first results from in situ characterization of NV-formation in single crystal diamonds following implantation of low energy nitrogen ions (7.7 keV), co-implantation of hydrogen, helium and carbon ions and in situ annealing. Diamond samples were implanted at room temperature or at a temperature of 780° C during the implantation steps. We find that dynamic annealing during co-implantation enhances NV-center formation by up to 25%.