Development of Amorphous Silicon Carbide Films Deposited by Dual-precursor PECVD in a Single Power Supply System for Use in Microbridge-based Electrostatic Actuators
Download or Read eBook Development of Amorphous Silicon Carbide Films Deposited by Dual-precursor PECVD in a Single Power Supply System for Use in Microbridge-based Electrostatic Actuators PDF written by James B. Summers and published by . This book was released on 2007 with total page 208 pages. Available in PDF, EPUB and Kindle.
Author | : James B. Summers |
Publisher | : |
Total Pages | : 208 |
Release | : 2007 |
ISBN-10 | : OCLC:123444801 |
ISBN-13 | : |
Rating | : 4/5 (01 Downloads) |
Book Synopsis Development of Amorphous Silicon Carbide Films Deposited by Dual-precursor PECVD in a Single Power Supply System for Use in Microbridge-based Electrostatic Actuators by : James B. Summers
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