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Type: BOOK - Published: 2017-03-15 - Publisher: John Wiley & Sons
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Type: BOOK - Published: 2012-09-19 - Publisher: John Wiley & Sons
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays
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Type: BOOK - Published: 2018-11-16 - Publisher: Royal Society of Chemistry
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Language: en
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Type: BOOK - Published: 2020-12-28 - Publisher: MDPI
Atomic layer deposition (ALD) is a thin film deposition process renowned for its ability to produce layers with unrivaled control of thickness and composition,