Related Books
Language: en
Pages: 145
Pages: 145
Type: BOOK - Published: 2016 - Publisher:
Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography tech
Language: en
Pages: 530
Pages: 530
Type: BOOK - Published: 2006 - Publisher:
High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (
Language: en
Pages: 390
Pages: 390
Type: BOOK - Published: 2011 - Publisher:
The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyroscopes) made of Aluminum Nitride (AlN) is described in this dissertation. The g
Language: en
Pages: 124
Pages: 124
Type: BOOK - Published: 2008 - Publisher:
Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (ME
Language: en
Pages: 481
Pages: 481
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes