MEMS Reliability
Author | : Allyson L. Hartzell |
Publisher | : Springer Science & Business Media |
Total Pages | : 300 |
Release | : 2010-11-02 |
ISBN-10 | : 9781441960184 |
ISBN-13 | : 144196018X |
Rating | : 4/5 (84 Downloads) |
Book excerpt: The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.