Rapid Thermal and Other Short-time Processing Technologies
Download or Read eBook Rapid Thermal and Other Short-time Processing Technologies PDF written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle.
| Author | : Fred Roozeboom |
| Publisher | : The Electrochemical Society |
| Total Pages | : 482 |
| Release | : 2000 |
| ISBN-10 | : 1566772745 |
| ISBN-13 | : 9781566772747 |
| Rating | : 4/5 (45 Downloads) |
Book Synopsis Rapid Thermal and Other Short-time Processing Technologies by : Fred Roozeboom
Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
