An Introduction to Surface-Micromachining
Download or Read eBook An Introduction to Surface-Micromachining PDF written by Robert W. Johnstone and published by Springer Science & Business Media. This book was released on 2004-06-03 with total page 210 pages. Available in PDF, EPUB and Kindle.
Author | : Robert W. Johnstone |
Publisher | : Springer Science & Business Media |
Total Pages | : 210 |
Release | : 2004-06-03 |
ISBN-10 | : 1402080204 |
ISBN-13 | : 9781402080203 |
Rating | : 4/5 (04 Downloads) |
Book Synopsis An Introduction to Surface-Micromachining by : Robert W. Johnstone
Book excerpt: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.