Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised

Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small produ

Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsy

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews differe

Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro a