"A collection of essays examining the history of nineteenth-century commercial lithography in Philadelphia. Analyzes the social, economic, and technological cha

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p

This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material