This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for proces

Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering application

A wide range of applications in chemistry and biochemistry are driving the rapid development of microfluidics. This book focuses its attention on an important s

This book provides an introductory overview of the research done in recent years in the area of magnetic sensors. The topics presented in this book range from f

As rapid technological developments occur in electronics, photonics, mechanics, chemistry, and biology, the demand for portable, lightweight integrated microsys