The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their proper

Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, includ